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Description
A User's Guide to EllipsometryThis text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry -- particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Binding Type: Paperback
Publisher: Dover Publications
Published: 07/07/2006
ISBN: 9780486450285
Pages: 260
Weight: 0.66lbs
Size: 8.50h x 5.64w x 0.56d
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★★★★★ 5
Great read
Format: Paperback
Great read
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Reviewed in the United States on March 12, 2026
★★★★★ 5
Worth it.
Format: Paperback
I'm a huge flash fan so I'd been waiting for his absolute run for a while. I won't spoil anything, but the book came in perfect condition. No scuffs or scratches or bends. It was packaged well.
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Reviewed in the United States on January 21, 2026
★★★★★ 5
decent
Format: Paperback
trying to get in to the new absolute series
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Reviewed in the United States on February 15, 2026
★★★★★ 5
Science Fiction at its best.
Format: Hardcover
A hard sci-fi take on our hero. Still much to uncover in later volumes, but I am ready for the ride.
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Reviewed in the United States on January 19, 2026
★★★★★ 4
hard to go wrong with Jeff Lemire.
Format: Kindle
Take all the pieces of the puzzle that is the Flash legacy, shake them up and put them all together into a completely different picture. That gives you some idea of what is going on in this book. Not always successful but always very interesting.
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Reviewed in the United States on January 4, 2026